An edition of IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
(1991)
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
ASMC '91 proceedings : October 21-23, 1991, Boston, Massachusetts.
by IEEE/SEMI Advanced Semiconductor Manufac...
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Publish Date
1991
Publisher
Institute of Electrical and Electronics Engineers,
May be purchased from IEEE Service Center
Language
English
Pages
212
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IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop: ASMC '91 proceedings : October 21-23, 1991, Boston, Massachusetts.
1991, Institute of Electrical and Electronics Engineers, May be purchased from IEEE Service Center
in English
0780301528 9780780301528
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Book Details
Edition Notes
"Sponsored by Semiconductor Equipment and Materials International ... [et al.]. Held in conjunction with SEMICON/East 91"--Cover.
IEEE catalog number 91-CH3042-9"--T.p. verso.
Includes bibliographical references.
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