An edition of Electrochemical processing in ULSI fabricatrion III (2002)

Electrochemical processing in ULSI fabricatrion III

proceedings of the International Symposium

by

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Cover of: Electrochemical processing in ULSI fabricatrion III by Symposium on Electrochemical Processing in ULSI Fabrication (3rd 2000 Toronto, Ont.)
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Last edited by Open Library Bot
April 28, 2010 | History
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An edition of Electrochemical processing in ULSI fabricatrion III (2002)

Electrochemical processing in ULSI fabricatrion III

proceedings of the International Symposium

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Electrochemical Society
Language
English
Pages
258

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Subjects
Congresses, Design and construction, Ultra large scale integration, Integrated circuits, Electric contacts, Dielectrics, Semiconductors, Electrochemical metallizing, Materials
Edition Availability
Cover of: Electrochemical processing in ULSI fabricatrion III
Electrochemical processing in ULSI fabricatrion III: proceedings of the International Symposium
2002, Electrochemical Society
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

"Held May 2000 in Toronto, Canada, as part of the 197th meeting of the Electrochemical Society."--Pref.

Includes bibliographical references and indexes.

Published in
Pennington, N.J
Series
Proceedings -- v. 2000-8, Proceedings (Electrochemical Society) -- v.2000-8.
Genre
Congresses.

The Physical Object

Pagination
viii, 258 p. :
Number of pages
258

ID Numbers

Open Library
OL22025705M
ISBN 10
1566772737

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History

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April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
January 28, 2010 Edited by WorkBot add more information to works
December 11, 2009 Created by WorkBot add works page