Atomic layer deposition applications 3

Atomic layer deposition applications 3
Symposium on Atomic Layer Depo ...
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Last edited by MARC Bot
December 20, 2020 | History

Atomic layer deposition applications 3

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Publish Date
Language
English
Pages
288

Buy this book

Edition Availability
Cover of: Atomic layer deposition applications 3
Atomic layer deposition applications 3
2007, Electrochemical Society
in English
Cover of: Atomic layer deposition applications 3
Atomic layer deposition applications 3
2007, Electrochemical Society
in English
Cover of: Atomic layer deposition applications 3
Atomic layer deposition applications 3
2007, Electrochemical Society
in English
Cover of: Atomic layer deposition applications 3
Atomic layer deposition applications 3
2007, Electrochemical Society
in English

Add another edition?

Book Details


Edition Notes

"Third Symposium on Atomic Layer Deposition Applications was held on October 8 and 9, 2007 in the Hilton Washington, Washington, DC as part of the 212th meeting of the Electrochemical Society"--P. iii.

"Dielectric and semiconductor materials, devices, and processing"--Cover.

Includes bibliographical references and index.

Published in
Pennington, NJ
Series
ECS transactions -- vol. 11, no.7
Genre
Congresses

Classifications

Dewey Decimal Class
621.38152
Library of Congress
TS695 .S96 2007

The Physical Object

Pagination
viii, 288 p. :
Number of pages
288

ID Numbers

Open Library
OL23859575M
ISBN 13
9781566775731
LCCN
2008276631

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History

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December 20, 2020 Edited by MARC Bot import existing book
February 12, 2019 Edited by MARC Bot import existing book
January 30, 2010 Edited by WorkBot add more information to works
December 11, 2009 Created by WorkBot add works page