An edition of Dopant clustering and diffusion in silicon (2010)

Dopant clustering and diffusion in silicon

1st ed.

by

Dopant clustering and diffusion in silicon
Kilian Vollenweider, Kilian Vo ...
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Last edited by LC Bot
October 23, 2011 | History
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An edition of Dopant clustering and diffusion in silicon (2010)

Dopant clustering and diffusion in silicon

1st ed.

by

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Publish Date
Publisher
Hartung-Gorre
Language
English
Pages
91

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Subjects

Semiconductor doping, Silicon, Microclusters, Simulation methods, Molecular dynamics, Diffusion rate

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Edition Availability
Cover of: Dopant clustering and diffusion in silicon
Dopant clustering and diffusion in silicon
2010, Hartung-Gorre
in English - 1st ed.
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Book Details

Edition Notes

"Reprint of Diss. ETH no. 19255"--T.p. verso.

Includes bibliographical references (p. 85-90).

Published in
Konstanz
Series
Series in microelectronics -- v. 212

Classifications

Library of Congress
QC611.8.S5 V65 2010

The Physical Object

Pagination
xii, 91 p. :
Number of pages
91

ID Numbers

Open Library
OL25060372M
ISBN 10
3866283547
ISBN 13
9783866283541
LCCN
2010546235

Source records

Library of Congress MARC record
Library of Congress MARC record
Library of Congress MARC record

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