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Table of Contents
1. Physical sputtering of single-element solids
2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography
3. Characteristics of sputtered particles, technical applications.
Edition Notes
Includes bibliographical references and indexes.
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The Physical Object
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Feedback?July 7, 2019 | Edited by MARC Bot | import existing book |
December 28, 2011 | Created by LC Bot | import new book |