An edition of Sputtering by particle bombardment (1981)

Sputtering by particle bombardment

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Last edited by MARC Bot
July 7, 2019 | History
An edition of Sputtering by particle bombardment (1981)

Sputtering by particle bombardment

  • 0 Ratings
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Publish Date
Publisher
Springer-Verlag
Language
English

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Previews available in: English

Edition Availability
Cover of: Sputtering by particle bombardment
Sputtering by particle bombardment
1981, Springer-Verlag
in English

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Book Details


Table of Contents

1. Physical sputtering of single-element solids
2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography
3. Characteristics of sputtered particles, technical applications.

Edition Notes

Includes bibliographical references and indexes.

Published in
Berlin, New York
Series
Topics in applied physics ;, v. 47, 52, 64
Other Titles
Particle bombardment.

Classifications

Dewey Decimal Class
530.4/1
Library of Congress
QC176.8.S72 S68

The Physical Object

Pagination
3 v. :

ID Numbers

Open Library
OL4258762M
Internet Archive
sputteringbypart00behr_158
ISBN 10
0387105212
LCCN
81004313
OCLC/WorldCat
7306737
Goodreads
4865595

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History

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July 7, 2019 Edited by MARC Bot import existing book
December 28, 2011 Created by LC Bot import new book