Instrumentation, metrology, and standards for nanomanufacturing

29-30 August 2007, San Diego, California, USA

Instrumentation, metrology, and standards for ...
John Allgair
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Last edited by ImportBot
August 2, 2020 | History

Instrumentation, metrology, and standards for nanomanufacturing

29-30 August 2007, San Diego, California, USA

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Publish Date
Publisher
SPIE
Language
English

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Book Details


Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Wash
Series
Proceedings of SPIE -- v. 6648, Proceedings of SPIE--the International Society for Optical Engineering -- v. 6648.
Genre
Congresses.

Classifications

Library of Congress
TA418.9.N35I566 2007, TA418.9.N35 I566 2007

The Physical Object

Pagination
1 v. (various pagings) :

ID Numbers

Open Library
OL14563753M
ISBN 10
0819467960
ISBN 13
9780819467966
LCCN
2010287800
OCLC/WorldCat
174965775
Goodreads
6983032

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History

Download catalog record: RDF / JSON
August 2, 2020 Edited by ImportBot import existing book
February 15, 2012 Created by LC Bot import new book