An edition of Advances in CMP/polishing technologies for the manufacture of electronic devices (2012)

Advances in CMP/polishing technologies for the manufacture of electronic devices

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Cover of: Advances in CMP/polishing technologies for the manufacture of electronic devices by Toshiro K. Doi, Ioan D. Marinescu, Syuhei Kurokawa, Toshiro K. Doi, Ioan D. Marinescu, Syuhei Kurokawa
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Last edited by ImportBot
April 7, 2023 | History
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An edition of Advances in CMP/polishing technologies for the manufacture of electronic devices (2012)

Advances in CMP/polishing technologies for the manufacture of electronic devices

by , , and

  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. --P. 4 of cover.

Publish Date
Publisher
Elsevier, William Andrew
Language
English
Pages
317

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Subjects

Electrolytic polishing, Grinding and polishing, Chemical mechanical planarization, TECHNOLOGY & ENGINEERING, Technical & Manufacturing Industries & Trades

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Cover of: Advances in CMP/polishing technologies for the manufacture of electronic devices
Advances in CMP/polishing technologies for the manufacture of electronic devices
2012, Elsevier, William Andrew
in English
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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Oxford, New York
Other Titles
CMP polishing technologies for the manufacture of electronic devices

Classifications

Library of Congress
TJ1280 .A38 2012, TJ1280, TJ1280 .A38 2012eb

The Physical Object

Pagination
xii, 317 p. :
Number of pages
317

ID Numbers

Open Library
OL25253810M
ISBN 10
1437778593
ISBN 13
9781437778595
LCCN
2012359712
OCLC/WorldCat
740631119, 774290238

Source records

Library of Congress MARC record
Library of Congress MARC record
Better World Books record
Library of Congress MARC record
marc_columbia MARC record
amazon.com record

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History

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April 7, 2023 Edited by ImportBot import existing book
December 18, 2022 Edited by MARC Bot import existing book
August 2, 2020 Edited by ImportBot import existing book
March 23, 2012 Created by LC Bot import new book