An edition of Introduction to microlithography (1983)

Introduction to microlithography

theory, materials, and processing

Cover of: Introduction to microlithography by L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983.
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Last edited by MARC Bot
December 9, 2022 | History
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An edition of Introduction to microlithography (1983)

Introduction to microlithography

theory, materials, and processing

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Publish Date
Publisher
The Society
Language
English
Pages
363

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Previews available in: English

Subjects

Microlithographie, Etching, Plasma etching, Gravure par plasma, Photoresists, Semiconductors, Congrès, Congresses, Résines photosensibles, Photolithographie, Microlithography, Photolithography

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Edition Availability
Cover of: Introduction to microlithography
Introduction to microlithography: theory, materials, and processing
1983, The Society
in English
Libraries near you: WorldCat

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Book Details

Table of Contents

An introduction to lithography / L.F. Thompson
The lithographic process
the physics / L.F. Thompson and M.J. Bowden
Organic resist materials
theory and chemistry / C. Grant Willson
Resist processing / L.F. Thompson and M.J. Bowden
Plasma etching / J.A. Mucha and D.W. Hess
Multi-layer resist systems / B.J. Lin.

Edition Notes

Includes bibliographical references and index.

Published in
Washington, D.C
Series
ACS symposium series,, 219

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TR940 .I57 1983

The Physical Object

Pagination
ix, 363 p. :
Number of pages
363

ID Numbers

Open Library
OL3164086M
Internet Archive
introductiontomi0000thom
ISBN 10
0841207755
LCCN
83005968
OCLC/WorldCat
9371344
Goodreads
5736173

Source records

Internet Archive item record
Internet Archive item record
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Library of Congress MARC record
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December 9, 2022 Edited by MARC Bot import existing book
March 5, 2018 Created by ImportBot import new book