An edition of Metallization (1991)

Metallization

performance and reliability issues for VLSI and ULSI ; 12-13 September 1991, San Jose, California

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Cover of: Metallization by Gennady S. Gildenblat, Gary P. Schwartz, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
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Last edited by MARC Bot
July 18, 2024 | History
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An edition of Metallization (1991)

Metallization

performance and reliability issues for VLSI and ULSI ; 12-13 September 1991, San Jose, California

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
159

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Previews available in: English

Subjects
Vapor-plating, Metallic films, Very large scale integration, Testing, Reliability, Congresses, Metallizing, Integrated circuits, Microlithography, Metal coating, Materials

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Edition Availability
Cover of: Metallization
Metallization: performance and reliability issues for VLSI and ULSI ; 12-13 September 1991, San Jose, California
1991, SPIE
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
Proceedings / SPIE--the International Society for Optical Engineering ;, v. 1596, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 1596.

Classifications

Library of Congress
TK7874 .M437 1991

The Physical Object

Pagination
vii, 159 p. :
Number of pages
159

ID Numbers

Open Library
OL1572307M
Internet Archive
metallizationper0000unse
ISBN 10
0819407275
LCCN
91067549
OCLC/WorldCat
25384158
Goodreads
5686610

Source records

Scriblio MARC record
Library of Congress MARC record
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July 18, 2024 Edited by MARC Bot import existing book
March 8, 2023 Edited by ImportBot import existing book
February 4, 2019 Created by MARC Bot import existing book