An edition of Microlithography and metrology in micromachining III (1997)

Microlithography and metrology in micromachining III

29-30 September, 1997, Austin, Texas

by

Cover of: Microlithography and metrology in micromachining III by Akira Umeda
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Last edited by ImportBot
August 1, 2023 | History
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An edition of Microlithography and metrology in micromachining III (1997)

Microlithography and metrology in micromachining III

29-30 September, 1997, Austin, Texas

by

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Publish Date
Publisher
SPIE
Language
English
Pages
134

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Previews available in: English

Subjects

Micromachining, Mensuration, Congresses, Microlithography, Measurement, Micromechanics
Edition Availability
Cover of: Microlithography and metrology in micromachining III
Microlithography and metrology in micromachining III: 29-30 September, 1997, Austin, Texas
1997, SPIE
in English

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Book Details

Edition Notes

Includes bibliographic references and author index.

Published in
Bellingham, Washington
Series
Proceedings / SPIE--the International Society for Optical Engineering ;, v. 3225, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 3225.

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TJ1191.5 .M532 1997, TJ1191.5.M532 1997

The Physical Object

Pagination
vii, 134 p. :
Number of pages
134

Edition Identifiers

Open Library
OL418740M
ISBN 10
0819426571
LCCN
98122576
OCLC/WorldCat
37676978
Goodreads
4358665

Work Identifiers

Work ID
OL18315038W

Source records

Scriblio MARC record
Library of Congress MARC record
Library of Congress MARC record
Better World Books record
Internet Archive item record
marc_columbia MARC record

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History

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August 1, 2023 Edited by ImportBot import existing book
January 17, 2023 Edited by ImportBot import existing book
February 12, 2019 Edited by MARC Bot import existing book
February 5, 2019 Created by MARC Bot import existing book