Multicomponent and multilayered thin films for advanced microtechnologies

techniques, fundamentals, and devices

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Last edited by ImportBot
February 25, 2022 | History

Multicomponent and multilayered thin films for advanced microtechnologies

techniques, fundamentals, and devices

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Publish Date
Publisher
Kluwer Academic
Language
English
Pages
633

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Book Details


Edition Notes

Includes bibliographical references and index.
"Published in cooperation with NATO Scientific Affairs Division."
"Proceeding of the NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies, Bad Windsheim, Germany, September 21-October 2, 1992"--T.p. verso.

Published in
Dordrecht, Boston
Series
NATO ASI series. Series E, Applied sciences ;, vol. 234, NATO ASI series., no. 234.

Classifications

Dewey Decimal Class
621.3815
Library of Congress
TK7872.T55 N38 1993, TA418.5-.84

The Physical Object

Pagination
xv, 633 p. :
Number of pages
633

ID Numbers

Open Library
OL1411647M
ISBN 10
0792322657
LCCN
93020488
Goodreads
3905309

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History

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February 25, 2022 Edited by ImportBot import existing book
February 5, 2019 Created by MARC Bot import existing book