An edition of Process and materials characterization and diagnostics in IC manufacturing (2003)

Process and materials characterization and diagnostics in IC manufacturing

27-28 February 2003, Santa Clara, California, USA

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Cover of: Process and materials characterization and diagnostics in IC manufacturing by Kenneth W. Tobin, Jr., Iraj Emami, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
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Last edited by ImportBot
July 27, 2023 | History
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An edition of Process and materials characterization and diagnostics in IC manufacturing (2003)

Process and materials characterization and diagnostics in IC manufacturing

27-28 February 2003, Santa Clara, California, USA

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
222

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Previews available in: English

Subjects
Semiconductor wafers, Semiconductors, Analysis, Design and construction, Quality control, Congresses, Defects, Integrated circuits industry, Integrated circuits

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Edition Availability
Cover of: Process and materials characterization and diagnostics in IC manufacturing
Process and materials characterization and diagnostics in IC manufacturing: 27-28 February 2003, Santa Clara, California, USA
2003, SPIE
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.
Earlier conference called: Design, process integration, and characterization for microelectronics.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series,, v. 5041, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 5041.
Genre
Congresses.
Other Titles
Design, process integration, and characterization for microelectronics.

Classifications

Library of Congress
TK7874 .P754 2003, TK7874.P754 2003

The Physical Object

Pagination
x, 222 p. :
Number of pages
222

ID Numbers

Open Library
OL3323609M
Internet Archive
isbn_081944846X_5041
ISBN 10
081944846X
LCCN
2004296392
OCLC/WorldCat
52842148

Source records

Scriblio MARC record
Better World Books record
Library of Congress MARC record
marc_columbia MARC record
Internet Archive item record

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History

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July 27, 2023 Edited by ImportBot import existing book
February 17, 2019 Created by MARC Bot import existing book