Micromachined devices and components V

20-21 September 1999, Santa Clara, California

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Last edited by ImportBot
July 31, 2020 | History

Micromachined devices and components V

20-21 September 1999, Santa Clara, California

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Publish Date
Publisher
SPIE
Language
English
Pages
304

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Book Details


Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series ; v. 3876, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 3876.
Genre
Congresses.
Other Titles
Micromachined devices and components 5, Micromachined devices and components five

Classifications

Dewey Decimal Class
620/.5
Library of Congress
TJ163 .M485 1999, TJ163.M485 1999

The Physical Object

Pagination
ix, 304 p. :
Number of pages
304

Edition Identifiers

Open Library
OL6804851M
ISBN 10
0819434736
LCCN
00267603
OCLC/WorldCat
42905417
Goodreads
7302055

Work Identifiers

Work ID
OL18945522W

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History

Download catalog record: RDF / JSON
July 31, 2020 Edited by ImportBot import existing book
February 18, 2019 Created by MARC Bot import existing book