Vacuum Arc Science and Technology is a comprehensive text describing the basic physics and technological applications of vacuum arcs. It represents the first major update on both the physics of the cathodic arc and the technology and applications of arc devices.

Part I describes basic physics of the vacuum arc, beginning with a brief tutorial review of plasma and electrical discharge physics, then describes the arc ignition process, cathode and anode spots which serve as the locus for plasma generation, and resultant interelectrode plasma. Part II describes the applications of the vacuum arc for depositing thin films and coatings, refining metals, switching high power, and as sources of intense electron, ion, plasma, and x-ray beams.

Also discussed for the first time are some of the unique developments in arctechnology that have taken place in the previous Soviet Union. Emphasis has also been placed on the properties of thin films deposited by arc evaporation, applications for such coatings, and emerging opportunities for arctechnology.

This book will be of great value to research workers in the field, the student requiring background information on this emerging technology, the industrial worker presently using arc evaporation and/or complementary deposition techniques or considering its use. The book represents the state of the art of arc science and technology as presented by leading expert scientists working in theoretical and experimental areas.