An edition of Microelectronic structures and MEMS for optical processing III (1997)

Microelectronic structures and MEMS for optical processing III

29-30 September, 1997, Austin, Texas

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Cover of: Microelectronic structures and MEMS for optical processing III by M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Soild State Technology.
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Last edited by MARC Bot
July 12, 2024 | History
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An edition of Microelectronic structures and MEMS for optical processing III (1997)

Microelectronic structures and MEMS for optical processing III

29-30 September, 1997, Austin, Texas

by and

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
214

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Previews available in: English

Subjects
Microelectromechanical systems, Optoelectronics, Microelectronics, Congresses, Optical instruments, Electromechanical devices
Edition Availability
Cover of: Microelectronic structures and MEMS for optical processing III
Microelectronic structures and MEMS for optical processing III: 29-30 September, 1997, Austin, Texas
1997, SPIE
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographic references and index.

Published in
Bellingham, Wash
Series
Proceedings of SPIE,, v. 3226, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 3226.

Classifications

Dewey Decimal Class
621.381/045
Library of Congress
TK7874 .M47382 1997, TK7874.M47382 1997

The Physical Object

Pagination
v, 214 p. :
Number of pages
214

ID Numbers

Open Library
OL418386M
Internet Archive
microelectronics3226unse
ISBN 10
081942658X
LCCN
98122103
OCLC/WorldCat
37706112
Goodreads
3935463

Source records

Scriblio MARC record
Better World Books record
Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record

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History

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July 12, 2024 Edited by MARC Bot import existing book
June 18, 2023 Edited by ImportBot import existing book
August 4, 2020 Edited by ImportBot import existing book
February 19, 2019 Created by MARC Bot import existing book