Handbook of microlithography, micromachining, and microfabrication

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Last edited by MARC Bot
February 19, 2019 | History

Handbook of microlithography, micromachining, and microfabrication

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Previews available in: English

Edition Availability
Cover of: Handbook of microlithography, micromachining, and microfabrication
Handbook of microlithography, micromachining, and microfabrication
1997, SPIE Optical Engineering Press, Institution of Electrical Engineers, Brand: Society of Photo-Optical Instrumentation Engineers, Society of Photo-Optical Instrumentation Engineers
in English

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Book Details


Table of Contents

v. 1. Microlithography
v. 2. Micromachining and microfabrication.

Edition Notes

Includes bibliographical references and indexes.

Published in
Bellingham, Wash., USA, London, UK
Series
IEE materials and devices series ;, 12A-12B, IEE materials & devices series ;, 12A-12B.
Other Titles
Microlithography, micromachining, and microfabrication

Classifications

Dewey Decimal Class
670
Library of Congress
TK7836 .H3423 1997, TK7836.H3423 1997

The Physical Object

Pagination
2 v. :
Number of pages
768

ID Numbers

Open Library
OL1001272M
Internet Archive
handbookofmicrol0001unse
ISBN 10
0819423785, 0819423793
LCCN
96040237
OCLC/WorldCat
36126447
Library Thing
4270009
Goodreads
3222961
3222960

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History

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February 19, 2019 Created by MARC Bot import existing book