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Publish Date
1997
Publisher
SPIE Optical Engineering Press,
Institution of Electrical Engineers,
Brand: Society of Photo-Optical Instrumentation Engineers,
Society of Photo-Optical Instrumentation Engineers
Language
English
Pages
768
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Previews available in: English
Subjects
Micromachining, Microfabrication, MicrolithographyShowing 1 featured edition. View all 1 editions?
Edition | Availability |
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Handbook of microlithography, micromachining, and microfabrication
1997, SPIE Optical Engineering Press, Institution of Electrical Engineers, Brand: Society of Photo-Optical Instrumentation Engineers, Society of Photo-Optical Instrumentation Engineers
in English
0819423785 9780819423788
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Book Details
Table of Contents
v. 1. Microlithography
v. 2. Micromachining and microfabrication.
Edition Notes
Includes bibliographical references and indexes.
Classifications
The Physical Object
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Feedback?February 19, 2019 | Created by MARC Bot | import existing book |