An edition of Handbook of microlithography, micromachining, and microfabrication (1997)

Handbook of microlithography, micromachining, and microfabrication

by

  • 1 Want to read
Cover of: Handbook of microlithography, micromachining, and microfabrication by P. Rai-Choudhury
Preview
Borrow Listen

My Reading Lists:

Create a new list

Check-In

×Close
Add an optional check-in date. Check-in dates are used to track yearly reading goals.
Today
Notes
  • 1 Want to read
Notes

Check nearby libraries

Buy this book

Last edited by MARC Bot
February 19, 2019 | History
Edit
An edition of Handbook of microlithography, micromachining, and microfabrication (1997)

Handbook of microlithography, micromachining, and microfabrication

by

  • 1 Want to read

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
SPIE Optical Engineering Press, Institution of Electrical Engineers, Brand: Society of Photo-Optical Instrumentation Engineers, Society of Photo-Optical Instrumentation Engineers
Language
English
Pages
768

Check nearby libraries

Buy this book

Previews available in: English

Subjects

Micromachining, Microfabrication, Microlithography
Edition Availability
Cover of: Handbook of microlithography, micromachining, and microfabrication
Handbook of microlithography, micromachining, and microfabrication
1997, SPIE Optical Engineering Press, Institution of Electrical Engineers, Brand: Society of Photo-Optical Instrumentation Engineers, Society of Photo-Optical Instrumentation Engineers
in English

Add another edition?

Book Details

Table of Contents

v. 1. Microlithography
v. 2. Micromachining and microfabrication.

Edition Notes

Includes bibliographical references and indexes.

Published in
Bellingham, Wash., USA, London, UK
Series
IEE materials and devices series ;, 12A-12B, IEE materials & devices series ;, 12A-12B.
Other Titles
Microlithography, micromachining, and microfabrication

Classifications

Dewey Decimal Class
670
Library of Congress
TK7836 .H3423 1997, TK7836.H3423 1997

The Physical Object

Pagination
2 v. :
Number of pages
768

ID Numbers

Open Library
OL1001272M
Internet Archive
handbookofmicrol0001unse
ISBN 10
0819423785, 0819423793
LCCN
96040237
OCLC/WorldCat
36126447
Library Thing
4270009
Goodreads
3222961
3222960

Source records

Scriblio MARC record
Library of Congress MARC record
Better World Books record
amazon.com record
Internet Archive item record
marc_columbia MARC record

Community Reviews (0)

Feedback?
No community reviews have been submitted for this work.

Lists

This work does not appear on any lists.

History

Download catalog record: RDF / JSON
February 19, 2019 Created by MARC Bot import existing book