Miniaturized systems with micro-optics and MEMS

20-22 September 1999, Santa Clara, California

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Last edited by ImportBot
July 31, 2020 | History

Miniaturized systems with micro-optics and MEMS

20-22 September 1999, Santa Clara, California

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Publish Date
Publisher
SPIE
Language
English
Pages
426

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Edition Availability
Cover of: Miniaturized systems with micro-optics and MEMS

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Book Details


Edition Notes

Includes bibliographical references and index.
Earlier conferences titled: Miniaturized systems with micro-optics and micromechanics.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series ;, v. 3878, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 3878.
Genre
Congresses.
Other Titles
Miniaturized systems with micro-optics and micromechanics.

Classifications

Dewey Decimal Class
621.36/93
Library of Congress
TA1660 .M567 1999, TA1660.M567 1999

The Physical Object

Pagination
viii, 426 p. :
Number of pages
426

ID Numbers

Open Library
OL6804850M
ISBN 10
0819434752
LCCN
00267602
OCLC/WorldCat
42908566
Goodreads
3935468

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History

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July 31, 2020 Edited by ImportBot import existing book
March 10, 2019 Created by MARC Bot import existing book