An edition of Emerging lithographic technologies VIII (2004)

Emerging lithographic technologies VIII

24-26 February, 2004, Santa Clara, California, USA

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Cover of: Emerging lithographic technologies VIII by R. Scott Mackay
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Last edited by MARC Bot
August 11, 2024 | History
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An edition of Emerging lithographic technologies VIII (2004)

Emerging lithographic technologies VIII

24-26 February, 2004, Santa Clara, California, USA

by

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Publish Date
Publisher
SPIE
Language
English
Pages
1110

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Previews available in: English

Subjects

Electron beam Lithography, X-rays, X-ray lithography, Congresses, Masks (Electronics), Industrial applications, Microlithography, Lithography, electron beam, X-rays, industrial applications, Electron beams
Edition Availability
Cover of: Emerging lithographic technologies VIII
Emerging lithographic technologies VIII: 24-26 February, 2004, Santa Clara, California, USA
2004, SPIE
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
Proceedings of SPIE,, v. 5374, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 5374.
Genre
Congresses.
Other Titles
Emerging lithographic technologies 8, Emerging lithographic technologies eight

Classifications

Library of Congress
TK7874 .E5233 2004, TK7874.E5233 2004

The Physical Object

Pagination
2 v. (xxxviii, 1110 p.) :
Number of pages
1110

ID Numbers

Open Library
OL3329381M
Internet Archive
emerginglithogra5374unse
ISBN 10
0819452874
LCCN
2004304504
OCLC/WorldCat
55686050
Goodreads
2310940

Source records

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Library of Congress MARC record
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August 11, 2024 Edited by MARC Bot import existing book
August 1, 2020 Edited by ImportBot import existing book
March 11, 2019 Created by MARC Bot import existing book