An edition of Metrology, inspection, and process control for microlithography XVII (2003)

Metrology, inspection, and process control for microlithography XVII

24-27 February, 2003, Santa Clara, California, USA

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Cover of: Metrology, inspection, and process control for microlithography XVII by Daniel J. C. Herr
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Last edited by ImportBot
July 5, 2023 | History
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An edition of Metrology, inspection, and process control for microlithography XVII (2003)

Metrology, inspection, and process control for microlithography XVII

24-27 February, 2003, Santa Clara, California, USA

by

  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
1248

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Previews available in: English

Subjects

Congresses, Measurement, Process control, Inspection, Microlithography, Integrated circuits

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Edition Availability
Cover of: Metrology, inspection, and process control for microlithography XVII
Metrology, inspection, and process control for microlithography XVII: 24-27 February, 2003, Santa Clara, California, USA
2003, SPIE
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Wash
Series
SPIE proceedings series ;, v. 5038, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 5038.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7874 .M43765 2003, TK7874.M43765 2003

The Physical Object

Pagination
2 v. (xxvii, 1248 p.) :
Number of pages
1248

ID Numbers

Open Library
OL3323590M
Internet Archive
metrologyinspect5038unse
ISBN 10
0819448435
LCCN
2004296373
OCLC/WorldCat
52544005
Goodreads
4308517

Source records

Scriblio MARC record
Better World Books record
Library of Congress MARC record
marc_columbia MARC record
Internet Archive item record
Internet Archive item record

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History

Download catalog record: RDF / JSON
July 5, 2023 Edited by ImportBot import existing book
January 7, 2023 Edited by MARC Bot import existing book
April 2, 2019 Created by MARC Bot import existing book