An edition of X-ray lithography and applications of soft x-rays to technology (1983)

X-ray lithography and applications of soft x-rays to technology

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Cover of: X-ray lithography and applications of soft x-rays to technology by Alan D. Wilson
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Last edited by ImportBot
June 14, 2023 | History
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An edition of X-ray lithography and applications of soft x-rays to technology (1983)

X-ray lithography and applications of soft x-rays to technology

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Publish Date
Publisher
SPIE--The International Society for Optical Engineering, SPIE
Language
English
Pages
140

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Previews available in: English

Subjects

Congresses, X-rays, Industrial applications, X-ray lithography
Edition Availability
Cover of: X-ray lithography and applications of soft x-rays to technology
X-ray lithography and applications of soft x-rays to technology
1984, SPIE--The International Society for Optical Engineering, SPIE
in English
Libraries near you: WorldCat
Cover of: X-ray lithography and applications of soft x-rays to technology
X-ray lithography and applications of soft x-rays to technology: October 19-20, 1983, Upton, New York
1983, SPIE
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

"October 19-20, 1983, Upton, New York."

Includes bibliographies.

Published in
Bellingham, Wash
Series
Proceedings of SPIE--the International Society for Optical Engineering -- v. 448

Classifications

Library of Congress
TK7874 X7 1984, TK7836 .X2 1983

The Physical Object

Pagination
vi, 140 p. :
Number of pages
140

ID Numbers

Open Library
OL19969235M
Internet Archive
xraylithographya0448unse
ISBN 10
0892524839
LCCN
83051563
Goodreads
4727014

Source records

Scriblio MARC record
Library of Congress MARC record
Internet Archive item record

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June 14, 2023 Edited by ImportBot import existing book
April 3, 2019 Created by MARC Bot import existing book