An edition of Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198) (2011)

Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198)

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Cover of: Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198) by Harry J. Levinson
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Last edited by MARC Bot
July 6, 2019 | History
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An edition of Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198) (2011)

Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198)

by

  • 0 Ratings
  • 1 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE Press
Pages
526

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Subjects
Microlithography, Integrated circuits, Design and construction

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Edition Availability
Cover of: Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198)
Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198)
Jan 21, 2011, SPIE Press
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Book Details

Classifications

Library of Congress
TK7874 .L397 2010

ID Numbers

Open Library
OL26830180M
Internet Archive
principleslithog00hjle
ISBN 10
0819483249
ISBN 13
9780819483249
LCCN
2010026775

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July 6, 2019 Edited by MARC Bot import existing book
April 3, 2019 Created by ImportBot import new book