Micromachined devices and components VI

18-19 September 2000, Santa Clara, USA

Micromachined devices and components VI
Eric Peeters, Oliver Paul
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Last edited by MARC Bot
April 9, 2019 | History

Micromachined devices and components VI

18-19 September 2000, Santa Clara, USA

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Publish Date
Publisher
SPIE
Language
English
Pages
282

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Book Details


Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series ; v. 4176, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4176.
Genre
Congresses.

Classifications

Dewey Decimal Class
620/.5
Library of Congress
TJ163 .M4853 2000, TJ163.M4853 2000

The Physical Object

Pagination
viii, 282 p. :
Number of pages
282

Edition Identifiers

Open Library
OL3963404M
ISBN 10
0819438324
LCCN
2001267697
OCLC/WorldCat
45410188

Work Identifiers

Work ID
OL19570055W

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April 9, 2019 Created by MARC Bot import existing book