An edition of Lithography process control (1999)

Lithography process control

by

Cover of: Lithography process control by Harry J. Levinson, Harry J. Levinson
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Last edited by Scott365Bot
October 22, 2023 | History
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An edition of Lithography process control (1999)

Lithography process control

by

x, 190 p. : 26 cm

Publish Date
Publisher
SPIE Optical Engineering Press
Language
English
Pages
190

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Buy this book

Previews available in: English

Subjects

Semiconductors, Quality control, Etching, Microlithography, Semi-conducteurs, Attaque chimique, Microlithographie, Qualité, Contrôle, TECHNOLOGY & ENGINEERING, Mechanical, Lithografie, Statistische Prozesslenkung, Commande de processus, Semiconducteurs, Lithographie (Halbleitertechnologie), Semiconductors -- Etching, Microlithography -- Quality control
Edition Availability
Cover of: Lithography Process Control
Lithography Process Control
1999, SPIE
in English
Libraries near you: WorldCat
Cover of: Lithography process control
Lithography process control
1999, SPIE Optical Engineering Press
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references (p. 169-188) and index.

Published in
Bellingham, Wash
Series
Tutorial texts in optical engineering ;, v. TT 28

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7871.85 .L464 1999, TK7871.85.L464 1999, TK7871.85 .L464 1999eb

The Physical Object

Pagination
x, 190 p. :
Number of pages
190

ID Numbers

Open Library
OL382069M
Internet Archive
lithographyproce0000levi
ISBN 10
0819430528
LCCN
98044433
OCLC/WorldCat
697188897
Goodreads
1579467

Source records

amazon.com record
Library of Congress MARC record
Better World Books record
marc_columbia MARC record
harvard_bibliographic_metadata record
Internet Archive item record

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History

Download catalog record: RDF / JSON
October 22, 2023 Edited by Scott365Bot import existing book
December 18, 2022 Edited by MARC Bot import existing book
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
February 1, 2010 Edited by WorkBot add more information to works
December 9, 2009 Created by WorkBot add works page