An edition of Advanced metallization for ULSI applications, 1992 (1993)

Advanced metallization for ULSI applications, 1992

proceedings of the conference held October 20-22, 1992, in Tempe, Arizona

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Cover of: Advanced metallization for ULSI applications, 1992 by sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, California, U.S.A. ; editors, Timothy S. Cale, Fabio S. Pintchovski ; associate editors, Robert S. Blewer ... [et al.].
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Last edited by MARC Bot
June 28, 2019 | History
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An edition of Advanced metallization for ULSI applications, 1992 (1993)

Advanced metallization for ULSI applications, 1992

proceedings of the conference held October 20-22, 1992, in Tempe, Arizona

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Materials Research Society.
Language
English
Pages
404

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Previews available in: English

Subjects
Metallic films, Electrochemical metallizing, Vapor deposition, Materials, Congresses, Ultra large scale integration, Tungsten, Integrated circuits

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Edition Availability
Cover of: Advanced Metallization for Ulsi Applications 1992 (Mrs Conference Proceedings Series, 9)
Advanced Metallization for Ulsi Applications 1992 (Mrs Conference Proceedings Series, 9)
March 1999, Materials Research Society
Hardcover in English
Libraries near you: WorldCat
Cover of: Advanced metallization for ULSI applications, 1992
Advanced metallization for ULSI applications, 1992: proceedings of the conference held October 20-22, 1992, in Tempe, Arizona
1993, Materials Research Society.
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and indexes.

Published in
Pittsburgh, Pa
Series
Materials Research Society conference proceedings,

Classifications

Dewey Decimal Class
621.39/5
Library of Congress
TK7871.15.F5 A38 1993

The Physical Object

Pagination
xiii, 404 p. :
Number of pages
404

ID Numbers

Open Library
OL1467072M
Internet Archive
advancedmetalliz00cale
ISBN 10
1558991921
LCCN
93127476
Goodreads
4731113

Source records

Internet Archive item record
Library of Congress MARC record

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June 28, 2019 Created by MARC Bot import existing book