Handbook of Advanced Plasma Processing Techniques
by Randy J. Shul
This volume covers the topic of advanced plasma processing techniques, from the fundamental physics of plasmas to diagnostics, modeling and applications such as etching and deposition for microelectronics. The use of plasmas for patterning on a submicron scale has enabled successive generations of continually smaller transistors, lasers, micromachines, sensors and magnetic read/write heads that have formed the basis of our information age. This volume is the first to give coverage to this broad area of topics in a detailed fashion, especially in the rapidly expanding fields of micro-mechanical machines, photomask fabrication, magnetic data storage and reactor modeling. It provides the reader with a broad array of topics, authored by the leading experts in the field.
Check nearby libraries
Buy this book
Previews available in: English
Subjects
Atomic & molecular, Manufacturing, General, Materials science, Physical & earth sciences -> physics -> nuclear & subatomic physics, Trades & technology -> industrial technology -> manufacturing, Trades & technology -> technology & engineering -> general, Trades & technology -> industrial technology -> materials science, Scz19000, Scp24009, Scz12000, Sct22050, Sct00004, Scz17000, 4227, 2928, 3148, 3643, 2887, 4741, Suco11644, 3714| Edition | Availability |
|---|---|
1
Handbook of Advanced Plasma Processing Techniques
2000, Springer Berlin Heidelberg, Imprint, Springer
electronic resource /
in English
3642569897 9783642569890
|
aaaa
|
Book Details
Edition Notes
Classifications
The Physical Object
ID Numbers
Community Reviews (0)
Feedback?
| December 20, 2023 | Edited by ImportBot | import existing book |
| June 30, 2019 | Created by MARC Bot | import new book |