Microsystem Technology and Microrobotics
by Sergej Fatikow
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots. Pictures and photos ease unterstanding and a wealth of references allow further work.
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Microsystem Technology and Microrobotics
1997, Springer Berlin Heidelberg
electronic resource /
in English
3642082327 9783642082320
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| December 20, 2023 | Edited by ImportBot | import existing book |
| February 26, 2022 | Edited by ImportBot | import existing book |
| July 5, 2019 | Created by MARC Bot | import new book |