An edition of Micro System Technologies 90
(1990)
Micro System Technologies 90
1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10-13 September 1990
by H. Reichl
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Micro System Technologies 90: 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10-13 September 1990
1990, Springer Berlin Heidelberg
electronic resource :
in English
3642456804 9783642456800
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Book Details
Table of Contents
Contents: Simulation and Design: Design of Micro Systems
CAD of Optical Devices
Simulation and Design - Electrical and Thermal Properties
Simulation and Design of Sensors
Measurement and Testing: Testing
Material Characterization - Physical Properties; Semiconductor Characteristics; Optical Methods
Materials: Materials for Packaging and Passivation
Integrated Optics Materials and Technologies
Technologies: Pattern Generation and Image Transfer
Laser Supported Deposition
Reactive Etching and Deposition
Contact Methods
Packaging
Optical Assembly and Interconnection Technologies
Sensor and Actuator Technologies
Basic Components and Applications: Sensors for Physical Parameters
Gas and Ionic Sensors
Sensors for Biological and Medical Application
Optical Sensors. Optical Components
Actuators
Author Index.
Edition Notes
Online full text is restricted to subscribers.
Also available in print.
Mode of access: World Wide Web.
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| February 26, 2022 | Edited by ImportBot | import existing book |
| July 5, 2019 | Created by MARC Bot | import new book |