An edition of Polymers in microlithography
(1989)
Polymers in microlithography
materials and processes
by Elsa Reichmanis
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Subjects
Polymers, Materials, Congresses, Microlithography, Photoresists, Microelectronics| Edition | Availability |
|---|---|
1
Polymers in Microlithography: Materials and Processes (Acs Symposium Series)
April 21, 1998, An American Chemical Society Publication
Hardcover
in English
0841217017 9780841217010
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2
Polymers in microlithography: materials and processes
1989, American Chemical Society
in English
0841217017 9780841217010
|
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Book Details
Edition Notes
Includes bibliographical references.
"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989."
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| July 31, 2020 | Edited by ImportBot | import existing book |
| July 6, 2019 | Created by MARC Bot | import existing book |