An edition of Polymers in microlithography (1989)

Polymers in Microlithography

Materials and Processes (Acs Symposium Series)

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Cover of: Polymers in Microlithography by Elsa Reichmanis
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Last edited by ImportBot
July 31, 2020 | History
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An edition of Polymers in microlithography (1989)

Polymers in Microlithography

Materials and Processes (Acs Symposium Series)

by

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Publish Date
Publisher
An American Chemical Society Publication
Language
English
Pages
433

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Previews available in: English

Subjects

Polymers, Materials, Congresses, Microlithography, Photoresists, Microelectronics
Edition Availability
Cover of: Polymers in Microlithography
Polymers in Microlithography: Materials and Processes (Acs Symposium Series)
April 21, 1998, An American Chemical Society Publication
Hardcover in English
Cover of: Polymers in microlithography
Polymers in microlithography: materials and processes
1989, American Chemical Society
in English

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Book Details

The Physical Object

Format
Hardcover
Number of pages
433

ID Numbers

Open Library
OL8226667M
ISBN 10
0841217017
ISBN 13
9780841217010
Goodreads
599681

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History

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July 31, 2020 Edited by ImportBot import existing book
July 6, 2019 Created by MARC Bot import existing book