Ion Implantation : Equipment and Techniques

Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982

Ion Implantation : Equipment and Techniques
H. Ryssel, H. Glawischnig, H. ...
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Last edited by ImportBot
May 19, 2020 | History

Ion Implantation : Equipment and Techniques

Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982

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Publish Date
Publisher
Springer
Pages
572

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Book Details


Edition Notes

Source title: Ion Implantation: Equipment and Techniques : Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982

The Physical Object

Format
paperback
Number of pages
572

ID Numbers

Open Library
OL28113969M
ISBN 10
3642691579
ISBN 13
9783642691577

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May 19, 2020 Created by ImportBot import new book