An edition of Chemical-Mechanical Planarization (2003)

Chemical-mechanical planarization

symposium held April 22-24, 2003, San Francisco, California, U.S.A.

by , , and

Cover of: Chemical-mechanical planarization by Michael R. Oliver, Duane S. Boning, Ingrid Vos
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Last edited by ImportBot
April 10, 2023 | History
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An edition of Chemical-Mechanical Planarization (2003)

Chemical-mechanical planarization

symposium held April 22-24, 2003, San Francisco, California, U.S.A.

by , , and

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Publish Date
Publisher
Materials Research Society, Cambridge University Press
Language
English
Pages
348

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Subjects

Electronic circuit design, Microelectronics, Semiconductors, Metals, pickling, Congresses, Materials, Grinding and polishing, Metals, Pickling, Surfaces, Chemical Mechanical Planarization

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Edition Availability
Cover of: Chemical-Mechanical Planarization
Chemical-Mechanical Planarization: Volume 767
2014, University of Cambridge ESOL Examinations
in English
Libraries near you: WorldCat
Cover of: Chemical-mechanical planarization
Chemical-mechanical planarization: symposium held April 22-24, 2003, San Francisco, California, U.S.A.
2003, Materials Research Society, Cambridge University Press
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and indexes.
"The papers in this proceedings were presented at Symposium F, 'Chemical-Mechanical Planarization,' held April 22-24 at the 2003 MRS Spring Meeting in San Francisco, California ..."--p. xi.

Published in
Warrendale, Pa
Series
Materials Research Society symposium proceedings ;, 767, Materials Research Society symposia proceedings ;, v. 767.
Genre
Congresses.

Classifications

Library of Congress
TK7871 .C44 2003

The Physical Object

Pagination
xi, 348 p. :
Number of pages
348

ID Numbers

Open Library
OL3325827M
ISBN 10
1558997040
LCCN
2004299462
OCLC/WorldCat
53191183
Library Thing
4669764
Goodreads
4590111

Source records

Better World Books record
Library of Congress MARC record
marc_columbia MARC record
amazon.com record
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April 10, 2023 Edited by ImportBot import existing book
December 8, 2020 Edited by MARC Bot import existing book
August 1, 2020 Created by ImportBot import existing book