An edition of Emerging Lithographic Technologies VII (2003)

Emerging lithographic technologies VII

25-27 February, 2003, Santa Clara, California, USA

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Cover of: Emerging lithographic technologies VII by Roxann L. Engelstad
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Last edited by MARC Bot
January 7, 2023 | History
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An edition of Emerging Lithographic Technologies VII (2003)

Emerging lithographic technologies VII

25-27 February, 2003, Santa Clara, California, USA

by

  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
1142

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Previews available in: English

Subjects

X-ray lithography, X-rays, industrial applications, Lithography, electron beam, Masks (electronics), Microlithography, Electron beam Lithography, Congresses, Industrial applications, X-rays, Masks (Electronics)
Edition Availability
Cover of: Emerging lithographic technologies VII
Emerging lithographic technologies VII: 25-27 February, 2003, Santa Clara, California, USA
2003, SPIE
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Wash
Series
Proceedings of SPIE ;, v. 5037, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 5037.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7874 .E5267 2003, TK7874.E5267 2003

The Physical Object

Pagination
2 v. (xviii, 1142 p.) :
Number of pages
1142

ID Numbers

Open Library
OL3317522M
Internet Archive
emerginglithogra0000unse
ISBN 10
0819448427
LCCN
2004266489
OCLC/WorldCat
52543912
Goodreads
3473306

Source records

Better World Books record
Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record
Promise Item
Internet Archive item record

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History

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January 7, 2023 Edited by MARC Bot import existing book
December 8, 2020 Edited by MARC Bot import existing book
August 1, 2020 Created by ImportBot import existing book