An edition of Optical Physics for Nanolithography (2018)

Optical Physics for Nanolithography

Pm284

by

Optical Physics for Nanolithography
Anthony Yen, Anthony Yen
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Last edited by MARC Bot
December 15, 2022 | History
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An edition of Optical Physics for Nanolithography (2018)

Optical Physics for Nanolithography

Pm284

by

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Publish Date
Publisher
SPIE
Language
English
Pages
352

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Subjects

Optics, Imaging systems, Lithography, Nanolithography, Optique, Imagerie (Technique), Nanolithographie
Edition Availability
Cover of: Optical Physics for Nanolithography
Optical Physics for Nanolithography: Pm284
2018, SPIE
in English
Cover of: Optical Physics for Nanolithography
Optical Physics for Nanolithography: Pm284
2018, SPIE
in English

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Book Details

Classifications

Library of Congress
QC355.3.Y46 2018, QC355.3 .Y456 2018eb

ID Numbers

Open Library
OL29392381M
ISBN 13
9781510617377
OCLC/WorldCat
1028853536

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marc_columbia MARC record

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History

Download catalog record: RDF / JSON
December 15, 2022 Edited by MARC Bot import existing book
August 25, 2020 Created by ImportBot import new book