An edition of Optical Physics for Nanolithography (2018)

Optical Physics for Nanolithography

Pm284

by

Optical Physics for Nanolithography
Anthony Yen, Anthony Yen
Locate

My Reading Lists:

Create a new list

Check-In

×Close
Add an optional check-in date. Check-in dates are used to track yearly reading goals.
Today
Notes
Notes

Check nearby libraries

Buy this book

Last edited by MARC Bot
December 15, 2022 | History
Edit
An edition of Optical Physics for Nanolithography (2018)

Optical Physics for Nanolithography

Pm284

by

This work doesn't have a description yet. Can you add one?

Publish Date
Publisher
SPIE
Language
English
Pages
352

Check nearby libraries

Buy this book

Subjects

Optics, Imaging systems, Lithography, Nanolithography, Optique, Imagerie (Technique), Nanolithographie
Edition Availability
Cover of: Optical Physics for Nanolithography
Optical Physics for Nanolithography: Pm284
2018, SPIE
in English
Cover of: Optical Physics for Nanolithography
Optical Physics for Nanolithography: Pm284
2018, SPIE
in English

Add another edition?

Book Details

Classifications

Library of Congress
QC355.3.Y46 2018, QC355.3 .Y456 2018eb

Edition Identifiers

Open Library
OL29392381M
ISBN 13
9781510617377
OCLC/WorldCat
1028853536

Work Identifiers

Work ID
OL21629758W

Source records

Better World Books record
marc_columbia MARC record

Community Reviews (0)

No community reviews have been submitted for this work.

Lists

This work does not appear on any lists.

History

Download catalog record: RDF / JSON
December 15, 2022 Edited by MARC Bot import existing book
August 25, 2020 Created by ImportBot import new book