An edition of Accurate linewidth measurement on integrated-circuit photomasks (1980)

Accurate linewidth measurement on integrated-circuit photomasks

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Accurate linewidth measurement on integrated- ...
John M. Jerke, editor, Electro ...
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Last edited by MARC Bot
October 18, 2020 | History
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An edition of Accurate linewidth measurement on integrated-circuit photomasks (1980)

Accurate linewidth measurement on integrated-circuit photomasks

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Publish Date
Publisher
U.S. Dept. of Commerce, National Bureau of Standards : U.S. Govt. Print. Off. : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
Language
English
Pages
154

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Subjects
Integrated circuits, Masks, Measurement
Edition Availability
Cover of: Accurate linewidth measurement on integrated-circuit photomasks
Accurate linewidth measurement on integrated-circuit photomasks
1980, U.S. Dept. of Commerce, National Bureau of Standards : U.S. Govt. Print. Off. : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
in English
  • Not in Library

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Book Details

Edition Notes

Includes bibliographical references.
"Issued February 1980."
"Supported by the Defense Advanced Research Projects Agency ... and the National Bureau of Standards."

Published in
Washington, D.C
Series
Semiconductor measurement technology, NBS special publication ; 400-43, NBS special publication ;, 400-43.

Classifications

Dewey Decimal Class
621.381/74
Library of Congress
QC100 .U57 no. 400-43, TK7874 .U57 no. 400-43

The Physical Object

Pagination
x, 154 p. :
Number of pages
154

ID Numbers

Open Library
OL4062779M
LCCN
79600191

Source records

Library of Congress MARC record

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October 18, 2020 Created by MARC Bot import existing book