An edition of Advanced etch technology for nanopatterning (2012)

Advanced etch technology for nanopatterning

13-14 February 2012, San Jose, California, United States

by , , and

Advanced etch technology for nanopatterning
Ying Zhang, G. S. Oehrlein, Qi ...
Locate

My Reading Lists:

Create a new list

Check-In

×Close
Add an optional check-in date. Check-in dates are used to track yearly reading goals.
Today
Notes
Notes

Check nearby libraries

Buy this book

Last edited by MARC Bot
October 28, 2020 | History
Edit
An edition of Advanced etch technology for nanopatterning (2012)

Advanced etch technology for nanopatterning

13-14 February 2012, San Jose, California, United States

by , , and

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
SPIE
Language
English

Check nearby libraries

Buy this book

Subjects

Lithography, Congresses, Plasma etching
Edition Availability
Cover of: Advanced etch technology for nanopatterning
Advanced etch technology for nanopatterning: 13-14 February 2012, San Jose, California, United States
2012, SPIE
in English

Add another edition?

Book Details

Edition Notes

"SPIE Advanced Lithography"--Cover.

"Advanced Etch Technology for Nano[p]atterning Conference (AETNC)"--Intro.

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
Proceedings of SPIE -- v. 8328, Proceedings of SPIE--the International Society for Optical Engineering -- v. 8328.
Other Titles
Advanced Etch Technology for Nanopatterning Conference (AETNC), AETNC

Classifications

Library of Congress
TA2020 .A615 2012, QC371 .S67 v. 8328

The Physical Object

Pagination
1 v. (various pagings)

ID Numbers

Open Library
OL30733352M
ISBN 10
0819489840
ISBN 13
9780819489845
LCCN
2012471867
OCLC/WorldCat
797974369

Source records

Library of Congress MARC record

Community Reviews (0)

Feedback?
No community reviews have been submitted for this work.

Lists

This work does not appear on any lists.

History

Download catalog record: RDF / JSON
October 28, 2020 Created by MARC Bot import new book