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Publish Date
1984
Publisher
North-Holland Physics Pub.,
Distributors for the USA and Canada, Elsevier Science Pub. Co.
Language
English
Pages
299
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Subjects
Semiconductors, Etching, Plasma etchingEdition | Availability |
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1
Dry etching for microelectronics
1984, North-Holland Physics Pub., Distributors for the USA and Canada, Elsevier Science Pub. Co.
in English
0444869050 9780444869050
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Book Details
Edition Notes
Bibliography: p. 223-294.
Includes index.
Classifications
The Physical Object
ID Numbers
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Feedback?October 30, 2020 | Created by MARC Bot | import existing book |