Optical characterization techniques for high-performance microelectronic device manufacturing

20 October 1994, Austin, Texas

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Last edited by Scott365Bot
October 23, 2023 | History

Optical characterization techniques for high-performance microelectronic device manufacturing

20 October 1994, Austin, Texas

vii, 202 p. : 28 cm

Publish Date
Publisher
SPIE
Language
English
Pages
202

Buy this book

Previews available in: English

Book Details


Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Wash., USA
Series
Proceedings / SPIE--the International Society for Optical Engineering ;, v. 2337, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 2337.

Classifications

Dewey Decimal Class
621.3815/2/0287
Library of Congress
TK7871.85 .O595 1994, TK7871.85.O595 1994

The Physical Object

Pagination
vii, 202 p. :
Number of pages
202

ID Numbers

Open Library
OL1125385M
Internet Archive
opticalcharacter0000unse
ISBN 10
0819416703
LCCN
94067263
OCLC/WorldCat
31210042
Goodreads
4064374

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October 23, 2023 Edited by Scott365Bot import existing book
November 18, 2020 Created by MARC Bot import existing book