An edition of Technologies for microlithography manufacturing (1995)

Technologies for microlithography manufacturing

11 July 1995, San Francisco, California

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Technologies for microlithography manufacturi ...
Willard Conley
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Last edited by MARC Bot
November 22, 2020 | History
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An edition of Technologies for microlithography manufacturing (1995)

Technologies for microlithography manufacturing

11 July 1995, San Francisco, California

by

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Publish Date
Publisher
Semiconductor Equipment and Materials International, The Society
Language
English
Pages
224

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Subjects

Congresses, Masks (Electronics), Semiconductors, Microlithography, Manufacturing processes, Design and construction
Edition Availability
Cover of: Technologies for microlithography manufacturing
Technologies for microlithography manufacturing: 11 July 1995, San Francisco, California
1995, Semiconductor Equipment and Materials International, The Society
in English
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Book Details

Edition Notes

Includes bibliographical references.

Published in
Mountain View, Calif., USA, Bellingham, Wash
Series
Technology tutorial series ;, v. 4

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7871.85 .T36 1995

The Physical Object

Pagination
v, 224 p. :
Number of pages
224

ID Numbers

Open Library
OL935053M
ISBN 10
0819420093
LCCN
95236474
OCLC/WorldCat
34358346

Source records

Library of Congress MARC record

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November 22, 2020 Created by MARC Bot import existing book