An edition of Optical metrology roadmap for the semiconductor, optical, and data storage industries II (2001)

Optical metrology roadmap for the semiconductor, optical, and data storage industries II

2-3 August, 2001, San Diego, USA

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Cover of: Optical metrology roadmap for the semiconductor, optical, and data storage industries II by Angela Duparré
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Last edited by ImportBot
July 28, 2023 | History
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An edition of Optical metrology roadmap for the semiconductor, optical, and data storage industries II (2001)

Optical metrology roadmap for the semiconductor, optical, and data storage industries II

2-3 August, 2001, San Diego, USA

by

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Publish Date
Publisher
SPIE
Language
English
Pages
294

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Previews available in: English

Subjects

Optoelectronics, Congresses, Optical measurements, Industrial applications, Surfaces (Technology), Measurement, Optoelectronic devices, Information retrieval, Technological innovations
Edition Availability
Cover of: Optical metrology roadmap for the semiconductor, optical, and data storage industries II
Optical metrology roadmap for the semiconductor, optical, and data storage industries II: 2-3 August, 2001, San Diego, USA
2001, SPIE
in English

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Book Details

Edition Notes

Includes bibliographic references and author index.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series,, v. 4449, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4449.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.381/045
Library of Congress
TA1750 .O552 2001

The Physical Object

Pagination
ix, 294 p. :
Number of pages
294

ID Numbers

Open Library
OL3582879M
ISBN 10
0819441635
LCCN
2002280022
OCLC/WorldCat
49011017
Goodreads
3386522

Source records

Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record

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History

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July 28, 2023 Edited by ImportBot import existing book
December 5, 2020 Created by MARC Bot import existing book