An edition of Advanced short-time thermal processing for Si-based CMOS devices (2003)

Advanced short-time thermal processing for Si-based CMOS devices

proceedings of the international symposium

by

Advanced short-time thermal processing for Si ...
Fred Roozeboom, Fred Roozeboom
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Last edited by MARC Bot
December 8, 2020 | History
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An edition of Advanced short-time thermal processing for Si-based CMOS devices (2003)

Advanced short-time thermal processing for Si-based CMOS devices

proceedings of the international symposium

by

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Publish Date
Publisher
Electrochemical Society
Language
English
Pages
480

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Subjects

Semiconductors, Congresses, Heat treatment, Rapid thermal processing
Edition Availability
Cover of: Advanced short-time thermal processing for Si-based CMOS devices
Advanced short-time thermal processing for Si-based CMOS devices: proceedings of the international symposium
2003, Electrochemical Society
in English

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Book Details

Edition Notes

"Electronics, Dielectric Science and Technology, and High Temperature Materials divisions."

Includes bibliographical references and indexes.

Published in
Pennington, NJ
Series
Proceedings -- v. PV 2003-14, Proceedings (Electrochemical Society) -- v. PV 2003-14.

Classifications

Dewey Decimal Class
621.39/732
Library of Congress
TK7871.85 A3538 2003

The Physical Object

Pagination
xiv, 480 p.
Number of pages
480

ID Numbers

Open Library
OL31589696M
ISBN 10
1566773962
LCCN
2003110354
OCLC/WorldCat
53890662

Source records

Library of Congress MARC record

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