Handbook of physical vapor deposition (PVD) processing

film formation, adhesion, surface preparation and contamination control

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Last edited by MARC Bot
July 15, 2024 | History

Handbook of physical vapor deposition (PVD) processing

film formation, adhesion, surface preparation and contamination control

  • 0 Ratings
  • 2 Want to read
  • 0 Currently reading
  • 0 Have read

This book covers all aspects of Physical Vapor Deposition (PVD) process technology, from the characterization and preparation of the substrate material to post deposition processing. It emphasizes the aspects of the process flow critical to economical deposition of films that can meet the required performance specifications.

Publish Date
Publisher
Noyes Publications
Language
English
Pages
917

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Previews available in: English

Book Details


Edition Notes

Includes bibliographical references and index.

Published in
Westwood, N.J
Genre
Handbooks, manuals, etc.

Classifications

Dewey Decimal Class
671.7/35
Library of Congress
TS695 .M38 1998, TS695.M38 1998, TS695 .M38 1998eb

The Physical Object

Pagination
xxvii, 917 p. :
Number of pages
917

ID Numbers

Open Library
OL697136M
Internet Archive
handbookphysical00matt_482
ISBN 10
0815514220
LCCN
97044664
OCLC/WorldCat
49708622, 281593731, 37806270
Library Thing
2144891
Goodreads
1989958

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History

Download catalog record: RDF / JSON
July 15, 2024 Edited by MARC Bot import existing book
December 19, 2022 Edited by MARC Bot import existing book
August 4, 2020 Edited by ImportBot import existing book
December 4, 2010 Edited by Open Library Bot Added subjects from MARC records.
December 10, 2009 Created by WorkBot add works page