An edition of Microlithography (1986)

Microlithography

process technology for IC fabrication

by

Cover of: Microlithography by David J. Elliott, David J. Elliott
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Last edited by Scott365Bot
October 22, 2023 | History
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An edition of Microlithography (1986)

Microlithography

process technology for IC fabrication

by

xix, 378 pages : 24 cm

Publish Date
Publisher
McGraw-Hill
Language
English
Pages
378

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Buy this book

Previews available in: English

Subjects

Very large scale integration, Design and construction, Microlithography, Integrated circuits, Photoresists, Integrated circuits -- Very large scale integration -- Design and construction
Edition Availability
Cover of: Microlithography
Microlithography: process technology for IC fabrication
1986, McGraw-Hill
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographies and index.

Published in
New York

Classifications

Dewey Decimal Class
621.381/73
Library of Congress
TK7874 .E495 1986

The Physical Object

Pagination
xix, 378 p. :
Number of pages
378

ID Numbers

Open Library
OL2537323M
Internet Archive
microlithography0000elli
ISBN 10
0070193045
LCCN
85018196
OCLC/WorldCat
12418734

Source records

Library of Congress MARC record
Promise Item
marc_columbia MARC record
Internet Archive item record

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History

Download catalog record: RDF / JSON
October 22, 2023 Edited by Scott365Bot import existing book
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
February 7, 2010 Edited by WorkBot add more information to works
December 10, 2009 Created by WorkBot add works page