An edition of Microlithography (1998)

Microlithography

science and technology

by and

Microlithography
James R. Sheats, Bruce W. Smit ...
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Last edited by MARC Bot
January 7, 2023 | History
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An edition of Microlithography (1998)

Microlithography

science and technology

by and

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Publish Date
Publisher
Marcel Dekker
Language
English
Pages
780

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Subjects

Microlithography, Industrial applications, Integrated circuits, Masks, Complementary Metal oxide semiconductors, Design and construction, Manufacturing processes, Microlithographie, Applications industrielles, Circuits intégrés, Masques, MOS complémentaires, Conception et construction, Fabrication, TECHNOLOGY & ENGINEERING, Mechanical
Edition Availability
Cover of: Microlithography
Microlithography: science and technology
1998, Marcel Dekker
in English

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
New York
Copyright Date
1998

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7836 .M525 1998eb

The Physical Object

Pagination
1 online resource (xii, 780 pages)
Number of pages
780

Edition Identifiers

Open Library
OL45477175M
ISBN 10
0585139334
ISBN 13
9780585139333
OCLC/WorldCat
44960707

Work Identifiers

Work ID
OL33542390W

Source records

marc_columbia MARC record

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January 7, 2023 Created by MARC Bot import new book