An edition of Microlithography (1998)

Microlithography

science and technology

by and

Microlithography
James R. Sheats, Bruce W. Smit ...
Not in Library

My Reading Lists:

Create a new list

Check-In

×Close
Add an optional check-in date. Check-in dates are used to track yearly reading goals.
Today
Notes
Notes

Check nearby libraries

Buy this book

Last edited by MARC Bot
January 7, 2023 | History
Edit
An edition of Microlithography (1998)

Microlithography

science and technology

by and

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
Marcel Dekker
Language
English
Pages
780

Check nearby libraries

Buy this book

Subjects

Microlithography, Industrial applications, Integrated circuits, Masks, Complementary Metal oxide semiconductors, Design and construction, Manufacturing processes, Microlithographie, Applications industrielles, Circuits intégrés, Masques, MOS complémentaires, Conception et construction, Fabrication, TECHNOLOGY & ENGINEERING, Mechanical
Edition Availability
Cover of: Microlithography
Microlithography: science and technology
1998, Marcel Dekker
in English
  • Not in Library
Libraries near you: WorldCat

Add another edition?

Book Details

Edition Notes

Includes bibliographical references and index.

Published in
New York
Copyright Date
1998

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7836 .M525 1998eb

The Physical Object

Pagination
1 online resource (xii, 780 pages)
Number of pages
780

ID Numbers

Open Library
OL45477175M
ISBN 10
0585139334
ISBN 13
9780585139333
OCLC/WorldCat
44960707

Source records

marc_columbia MARC record

Community Reviews (0)

Feedback?
No community reviews have been submitted for this work.

Lists

This work does not appear on any lists.

History

Download catalog record: RDF / JSON
January 7, 2023 Created by MARC Bot import new book