An edition of Microlithography
(1998)
Microlithography
science and technology
by James R. Sheats and Bruce W. Smith
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Subjects
Microlithography, Industrial applications, Integrated circuits, Masks, Complementary Metal oxide semiconductors, Design and construction, Manufacturing processes, Microlithographie, Applications industrielles, Circuits intégrés, Masques, MOS complémentaires, Conception et construction, Fabrication, TECHNOLOGY & ENGINEERING, Mechanical| Edition | Availability |
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Edition Notes
Includes bibliographical references and index.
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| January 7, 2023 | Created by MARC Bot | import new book |