Modeling of film deposition for microelectronic applications

Modeling of film deposition for microelectron ...
Abraham Ulman, Maurice H. Fran ...
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Last edited by ImportBot
September 17, 2024 | History

Modeling of film deposition for microelectronic applications

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Publish Date
Publisher
Academic Press
Language
English
Pages
291

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Book Details


Table of Contents

Michael J. Brett, Steven K. Dew, and Tom J. Smy
Michael J. Brett, Steven K. Dew, and Tom J. Smy -- S. Hamaguchi
Michael J. Brett, Steven K. Dew, and Tom J. Smy -- S. Hamaguchi -- C.-C.Fang, [et al.]
Michael J. Brett, Steven K. Dew, and Tom J. Smy-- S. Hamaguchi-- C.-C.Fang, [et al.]-- Timothy S. Cale and Vadali Mahadev

Edition Notes

Includes bibliographical references and indexes

Published in
San Diego
Series
Thin films -- v. 22, Thin films (San Diego, Calif.) -- v. 22

The Physical Object

Pagination
xiv, 291 p. :
Number of pages
291

ID Numbers

Open Library
OL16842999M
ISBN 10
0125330227
Digital Object Identifier (DOI)
10.1604/9780125330220
Goodreads
1210610

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Better World Books record

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History

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September 17, 2024 Created by ImportBot import existing book