Ein Bandstrahl-Beleuchtungssystem für die Vielstrahl-Elektronen-Lithographie mit Kammsonde

Ein Bandstrahl-Beleuchtungssystem für die Vie ...
Hermann Schäfer, Hermann Schäf ...
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Last edited by MARC Bot
December 8, 2024 | History

Ein Bandstrahl-Beleuchtungssystem für die Vielstrahl-Elektronen-Lithographie mit Kammsonde

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Publish Date
Language
German
Pages
78

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Book Details


Edition Notes

Thesis (doctoral)--Eberhard-Karls-Universität zu Tübingen, 1992.

The Physical Object

Pagination
78 p.
Number of pages
78

ID Numbers

Open Library
OL57071106M
OCLC/WorldCat
53061954

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December 8, 2024 Created by MARC Bot import new book