Optimierung der Strahlungscharakteristik eines Pinchplasmas für die Röntgenlithographie

Optimierung der Strahlungscharakteristik eine ...
Jürgen Eberle, Jürgen Eberle
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Last edited by MARC Bot
December 11, 2024 | History

Optimierung der Strahlungscharakteristik eines Pinchplasmas für die Röntgenlithographie

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Publish Date
Language
German
Pages
117

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Book Details


Edition Notes

Thesis (doctoral)--Rheinisch-Westfälische Technische Hochschule Aachen, 1990.

The Physical Object

Pagination
117 p.
Number of pages
117

ID Numbers

Open Library
OL57138427M
OCLC/WorldCat
60330849

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December 11, 2024 Created by MARC Bot import new book